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Research Abstracts Online
January - December 2011

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University of Minnesota Twin Cities
College of Science and Engineering
Department of Mechanical Engineering

PI: Thomas R. Chase

MEMS Proportional Pneumatic Valve

The goal of this project is to create an efficient miniature proportional valve for controlling airflow in pneumatic systems based on Micro-Electrical Mechanical Systems (MEMS) technology. The valve is intended to operate at pressures up to 7 bar (700 kPa / 100 psi) with a pressure drop of no more than 0.4 bar (35 kPa / 5 psi) when operated at a flow rate of 85 slpm in the fully open state. Actuation efficiency is fully important of fluidic efficiency: the goal is to be able to hold a normally closed valve in the fully open state with an actuation power of 1 watt or less. The target envelope of the valve is 1 cm3.

Group Member

Nebiyu Fikru, Graduate Student