MEMS Proportional Pneumatic Valve
This project involves designing a new type of generic pneumatic valve based on micro-electrical-mechanical-systems (MEMS) technology. The valve utilizes an array of micro-actuators positioned over a matching array of micro-orifices. Several benefits are realized by using this scheme instead of a single large actuator acting on a single large orifice. The three most notable are very low actuation power requirements, very fast response and potentially very low cost. The potential cost benefits are realized by exploiting MEMS batch fabrication technologies. MSI resources are utilized to do computational mechanics flow modeling for the valve.
A bibliography of this group’s publications is attached.
Return to this PI's main page.