Project abstract for group chasetr

MEMS Proportional Valve

These researchers are designing a MEMS-scale proportional valve, initially intended for pneumatic applications up to 7 bar operating pressure. The valve utilizes PZT (lead-zirconate-titanate) actuators. The chief advantage of the valve is extremely low driving power: a 40 SLPM valve is expected to require only about 5 mW to hold it in the fully open state. MSI resources are being utilized to do flow modeling associated with the valve design.